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【英文标准名称】:StandardGuideforDepthProfilinginAugerElectronSpectroscopy
【原文标准名称】:螺旋电子光谱法的深度剖面的标准指南
【标准号】:ASTME1127-2003
【标准状态】:现行
【国别】:
【发布日期】:2003
【实施或试行日期】:
【发布单位】:美国材料与试验协会(ASTM)
【起草单位】:E42.03
【标准类型】:(Guide)
【标准水平】:()
【中文主题词】:精整;分析;表面;剖面高度;金属;螺旋电子光谱法;光谱学
【英文主题词】:anglelapping;angle-resolvedAES;Augerelectronspectroscopy;ballcratering;compositionaldepthprofiling;crosssectioning;depthprofiling;depthresolution;sputterdepthprofiling;sputtering;thinfilms;
【摘要】:Augerelectronspectroscopyyieldsinformationconcerningthechemicalandphysicalstateofasolidsurfaceinthenearsurfaceregion.Nondestructivedepthprofilingislimitedtothisnearsurfaceregion.Techniquesformeasuringthecraterdepthsandfilmthicknessesaregivenin(35).Ionsputteringisprimarilyusedfordepthsoflessthantheorderof1x03BC;m.Anglelappingormechanicalcrateringisprimarilyusedfordepthsgreaterthantheorderof1x03BC;m.Thechoiceofdepthprofilingmethodsforinvestigatinganinterfacedependsonsurfaceroughness,interfaceroughness,andfilmthickness(1).31.1ThisguidecoversproceduresusedfordepthprofilinginAugerelectronspectroscopy.1.2Guidelinesaregivenfordepthprofilingbythefollowing:SectionIonSputtering6AngleLappingandCross-Sectioning7MechanicalCratering8NondestructiveDepthProfiling91.3Thisstandarddoesnotpurporttoaddressallofthesafetyproblems,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:A43
【国际标准分类号】:71_040_50
【页数】:5P.;A4
【正文语种】: